Dongfang Kejie Technology Co., Ltd
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One click fully automatic fast ellipsometer Auto SE
One click fully automatic fast ellipsometer Auto SE
Product details

Innovation point

Unique spot visualization system (patented technology): Auto SE integrates the unique MyAutoView spot visualization system (patented technology), which is equipped in a standard elliptical polarization spectrometer, allowing the operator to observe the sample spot throughout the entire process to ensure that various types of samples can be measured in the completely correct position with the appropriate spot size. Solved the problem of "blind measurement" in existing measurement technologies.

One click operation greatly improves work efficiency.

Confocal micro spot technology: Provides automatic selection of 8 different spot sizes.

Fully automatic intelligent diagnosis and fault handling: greatly reducing the maintenance burden of equipment.

Instrument Introduction:

The new fully automatic thin film measurement and analysis tool is industrially designed, easy to operate, and can complete fully automatic measurement and analysis in seconds, and output analysis reports. It is an ideal solution for rapid thin film measurement and device quality control.

Technical parameters:

·Spectral range: 450-1000 nm

·Multiple automatic selection of micro light spots

·Patent spot visualization technology, capable of observing any sample surface

·CCD detector

·Automatic sample table size: 200mmX200mm; XYZ direction automatic adjustment; Z-axis height>35mm

·70 degree angle incidence

Main features:

·Fully automated design, one click operation, direct report output

·LCD modulation technology, measuring the absence of moving parts in the optical path

·CCD detection system, fast full spectrum output

·Multiple micro spot size options, patented visual technology

·Closed sample compartment

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Successful operation!

Successful operation!